Development of Vacuum-Chamber-Type Capacitive Micro-Pressure Sensors
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DOI: 10.3390/mi16111290
Abstract: This study presents the development of a capacitive pressure sensor tailored for measuring the dynamic pressure of flow fields. The sensor is fabricated using the UMC 0.18 μm CMOS-MEMS process, incorporated with additional post-processing steps… read more here.
Keywords: pressure; development vacuum; vacuum chamber; chamber type ... See more keywords