A dispatching method for the lots of different priorities in 450-mm semiconductor manufacturing
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DOI: 10.1177/1687814017713945
Abstract: Semiconductor industry grows rapidly in recent years. It has an impact on the economies all over the world. For the mass production requirement, the wafer size starts to be increased from 300 to 450 mm. The… read more here.
Keywords: different priorities; semiconductor; conveyor dispatching; time ... See more keywords