Deposition and characterization of phase-pure Ti 2 AlC and Ti 3 AlC 2 coatings by DC magnetron sputtering with cost-effective targets
Sign Up to like & getrecommendations! Published in 2018 at "Vacuum"
DOI: 10.1016/j.vacuum.2018.04.001
Abstract: Abstract Ti2AlC and Ti3AlC2 coatings were successfully prepared via a two-step method with initial DC magnetron sputtering at ambient temperature and post annealing at 800 °C for 1 h. Particularly, cost-effective targets synthesized by hot-pressing Ti/Al/C powders… read more here.
Keywords: phase; magnetron sputtering; effective targets; cost effective ... See more keywords