X-ray Imaging of Functional Three-Dimensional Nanostructures on Massive Substrates
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DOI: 10.1021/acsnano.9b05519
Abstract: To investigate the performance of three-dimensional (3D) nanostructures, it is vital to study their internal structure with a methodology that keeps the device fully functional and ready for further integration. To this aim, we introduce… read more here.
Keywords: three dimensional; gap; nanostructures massive; dimensional nanostructures ... See more keywords