Polysilicon micro-heaters for resonance tuning in CMOS photonics.
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DOI: 10.1364/ol.441510
Abstract: A new, to the best of our knowledge, device platform for tuning the resonance wavelength of integrated photonic resonators based on polysilicon-based micro-heaters for complementary metal-oxide semiconductor (CMOS)-foundry-based active Si photonics is demonstrated. The miniaturized… read more here.
Keywords: resonance tuning; photonics; cmos; polysilicon micro ... See more keywords