Synthesis of nanocrystalline δ-MoN by thermal annealing of amorphous thin films grown on (100) Si by reactive sputtering at room temperature
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DOI: 10.1016/j.tsf.2018.06.010
Abstract: Abstract We report on the synthesis and characterization of nanocrystalline δ-MoN by crystallization of amorphous thin films grown on (100) Si by reactive sputtering at room temperature. Films with chemical composition MoN were grown using… read more here.
Keywords: amorphous thin; thin films; temperature; nanocrystalline mon ... See more keywords