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Published in 2020 at "IEEE Access"
DOI: 10.1109/access.2020.3008192
Abstract: A resonant-type piezoelectric screw motor for one degree of freedom (1-DOF) positioning platform is proposed, fabricated, and investigated in this article. The motor comprises a driver and a screw rod. The driver is composed of…
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Keywords:
piezoelectric screw;
motor;
resonant type;
screw motor ... See more keywords
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Published in 2022 at "IEEE Transactions on Instrumentation and Measurement"
DOI: 10.1109/tim.2021.3130307
Abstract: Nano positioning platform, which is widely used in micro and nano measurement field such as scanning tunneling microscope (STM), becomes an indispensable multi-dimensional driving actuator. A good positioning platform is composed of precise mechanical structure,…
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Keywords:
platform;
nano positioning;
positioning platform;
compound control ... See more keywords