Articles with "silicon oxycarbonitride" as a keyword



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The influence of the conditions of synthesis on the composition and mechanical properties of silicon oxycarbonitride nanocomposite films

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Published in 2017 at "Protection of Metals and Physical Chemistry of Surfaces"

DOI: 10.1134/s2070205117020095

Abstract: Dielectric films of hydrogenated silicon oxycarbonitride SiCxNyOz:H were prepared by plasmaenhanced chemical vapor deposition using gas mixtures of 1,1,1,3,3,3-hexamethyldisilazane (HMDS) or 1,1,3,3-tetramethyldisilazane (TMDS) with oxygen and nitrogen in the temperature range of 373–973 K. The… read more here.

Keywords: synthesis composition; silicon oxycarbonitride; conditions synthesis; influence conditions ... See more keywords
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Porous Silicon Oxycarbonitride Ceramics with Palladium and Pd2Si Nanoparticles for Dry Reforming of Methane

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Published in 2022 at "Polymers"

DOI: 10.3390/polym14173470

Abstract: Pd-containing precursor has been synthesized from palladium acetate and poly(vinly)silazane (Durazane 1800) in an ice bath under an argon atmosphere. The results of ATR-FTIR and NMR characterizations reveal the chemical reaction between palladium acetate and… read more here.

Keywords: dry reforming; reforming methane; porous silicon; palladium ... See more keywords