Surfing Scanning Probe Nanolithography at Meters Per Second.
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DOI: 10.1021/acs.nanolett.1c03705
Abstract: Scanning probe lithography (SPL) as a maskless approach with a low tool price can pattern a variety of materials at a nanometer or even atomic resolution. However, the throughput of conventional SPLs is extremely low… read more here.
Keywords: probe nanolithography; per second; scanning probe; meters per ... See more keywords