Synthesis of δ-Ta2O5 heteroepitaxial films on YVO4 (100) substrates
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DOI: 10.1016/j.mssp.2021.106065
Abstract: Abstract Hexagonal tantalum pentoxide (δ-Ta2O5) single-crystalline films were synthesized on Yttrium Vanadate (YVO4) (100) by metalorganic chemical vapor deposition (MOCVD) and post annealing process. The film annealed at 900 °C exhibited single crystal structure with the… read more here.
Keywords: synthesis ta2o5; ta2o5; films yvo4; ta2o5 heteroepitaxial ... See more keywords