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Fabricating Three-Dimensional Periodic Micro Patterns on Photo-Resists Using Laser Interference Lithography†

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Springtails are hexapods, which have a complex skin surface composed of periodically arranged mushroom-like features. This topography offers surface functionalities like non-wetting and preventing bacterial settlement. This study demonstrates a… Click to show full abstract

Springtails are hexapods, which have a complex skin surface composed of periodically arranged mushroom-like features. This topography offers surface functionalities like non-wetting and preventing bacterial settlement. This study demonstrates a novel way of replicating the morphology of the springtail skin using interference lithography. The micro patterns are produced with an undercut contour in a multilayer resist system on Si-wafers consisting of a lower lift-off resist and an upper photo-sensitive resist. After irradiation, several developing and rinsing steps are carried out to produce cavities in the lift-off resist layer with an undercut geometry directly below the SU-8 top layer.

Keywords: photo; interference lithography; micro patterns

Journal Title: Advanced Engineering Materials
Year Published: 2017

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