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Selective Growth of Ferroelectric Ultrathin Nonlayered γ-In2Se3.

Indium selenide (In2Se3) has received increasing interest due to its diverse polytypes and associated polytype-dependent ferroelectric properties, making it one of the promising platforms guiding the development of ultrathin ferroelectric… Click to show full abstract

Indium selenide (In2Se3) has received increasing interest due to its diverse polytypes and associated polytype-dependent ferroelectric properties, making it one of the promising platforms guiding the development of ultrathin ferroelectric nanodevices. To date, α-, β-, and β'-phase In2Se3 have been well studied, but nonlayered γ-In2Se3 remains underexplored because of sophisticated formation paths and minor energy differences with other phases. Therefore, understanding the growth mechanisms and electronic structures of γ-In2Se3 is crucial to present the full roadmap of the InxSey family. Herein, a precursor-guided chemical vapor deposition (CVD) method is proposed to selectively grow ultrathin γ-In2Se3 crystals with a nonlayered, vacancy-ordered screw form (VOSF) structure. The sublimation temperature of precursors plays a critical role in selectively synthesizing α-, β-, and γ-phase In2Se3 using different precursors (In2Se3, In2O3, InCl3). Ex situ scanning transmission electron microscopy (STEM) reveals a γ-In2Se3-to-InSe phase transition at 600 °C, consecutively triggered by interlayer bonds broken, vacancy reorganization and removal of Se atoms. Away from existing literature, only out-of-plane ferroelectricity in γ-In2Se3, driven by vertical off-center displacements of Se atoms, is detected. Therefore, a full spectrum of In2Se3's polytypes, particularly nonlayered ferroelectric γ-In2Se3, is selectively obtained, presenting great potential for next-generation In2Se3-based polytypes-dependent nanoelectromechanical and memory devices.

Keywords: in2se3; ferroelectric ultrathin; growth ferroelectric; selective growth; nonlayered in2se3

Journal Title: Advanced materials
Year Published: 2025

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