LAUSR

Homo-epitaxial (100) single crystal diamond films of different isotopic (C-13) compositions were synthesized by micro-wave plasma chemical vapor deposition. An increase in C-13 concentration (0 to 99%) demonstrated clear developments in microstructures. These are related to changes in: (i) morphology, (ii) residual strain and dislocations and (iii) mesoscopic defects. (i) was mainly through increased presence of steps/ledges and corresponding increase in surface roughness. This was accompanied by significantly higher residual strain and presence/energy of dislocations. C-13 concentration also determined mesoscopic defects: presence of non-(100) orientations, nature of grain boundaries and micro-segregations of C-13 and/or CH. A link has been established between various reproducible, experimental observations through stipulated increase in interfacial energy and stresses present at grain boundaries.