LAUSR

The impact of rough surface morphology on the angular distribution of eroded impurities has been investigated with the three-dimensional (3D) rough surface code SURO and a newly developed analytic model. The property of the rough surface structure can be described by the shadow angle of the rough surface in SURO, which is defined as the ratio of the horizontal characteristic length to the initial surface roughness. The SURO simulation results show that the influence of the rough surface on the angular distribution of eroded impurities comes into play when the shadow angle is larger than a threshold value. The larger shadow angle of the rough surface leads to a stronger shift of the angular distribution of the eroded impurities. Different rough surface topographies have been used in the SURO code to check the angular distribution of the eroded impurities. It is found that the shift tendency of the angular distribution is similar for different structures of the rough surface. Based on the numerical modelling results, an analytical model has been developed to investigate the impact of the shadow angle on the angular distribution of the eroded impurities, which shows the consistent result as the SURO simulations.