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Synthesis of vertically aligned carbon nanofibers using inductively coupled plasma-enhanced chemical vapor deposition

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This journal paper reports a highly reliable and efficient method for the growth of vertically aligned carbon nanofibers. The inductively coupled plasma-enhanced chemical vapor deposition method utilizes a low substrate… Click to show full abstract

This journal paper reports a highly reliable and efficient method for the growth of vertically aligned carbon nanofibers. The inductively coupled plasma-enhanced chemical vapor deposition method utilizes a low substrate temperature (approx. 650 $${^{\circ }}$$∘C) for the growth purpose using toluene as carbon source. Carbon nanofibers are characterized using SEM (scanning electron microscopy), EDX (energy-dispersive X-ray) and Raman spectroscopy. Uniform carbon nanofibers are grown on different substrates. The results further show that the use of catalyst is not mandatory to grow the carbon nanofibers.

Keywords: carbon; coupled plasma; vertically aligned; aligned carbon; carbon nanofibers; inductively coupled

Journal Title: Electrical Engineering
Year Published: 2018

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