LAUSR

This paper uses TRT-LBM coupled with the effective viscosity to predict squeeze film air damping (SQFD) of micro-beam in the transition regime. The result shows that, in the transition regime, recent MC model underestimates the quality factor for ignoring the gas viscosity effect and recent Reynolds model overestimates it for ignoring the rarefaction effect. The TRT-LBM model proposed in this paper is more accurate than Reynolds and MC models in the transition regime. In addition, the end effect on SQFD is discussed, which shows that the constant ambient pressure condition on the edges would overestimate the quality factor of SQFD.