LAUSR.org creates dashboard-style pages of related content for over 1.5 million academic articles. Sign Up to like articles & get recommendations!

Development of a 2D array of micromachined electromagnetic digital actuators for micro-conveyance applications

Photo from wikipedia

In this paper a 5 × 5 micromachined digital electromagnetic actuator array for microdisplacements is presented. Each elementary actuator is composed of a permanent magnet placed in a silicon square cavity. This… Click to show full abstract

In this paper a 5 × 5 micromachined digital electromagnetic actuator array for microdisplacements is presented. Each elementary actuator is composed of a permanent magnet placed in a silicon square cavity. This magnet can be switched between four discrete positions and can be switched by applying current pulses through wires placed below the cavity. A semi-analytical model has been developed to design the actuator. Then, a prototype, composed of a silicon part, has been manufactured using deep reactive ion etching process. An elementary actuator was as firstly experimentally characterized. Then the array was used to realize a conveyance task. The maximum displacement quantum of the conveyed object is 115 µm.

Keywords: array; micromachined electromagnetic; array micromachined; development array; conveyance; actuator

Journal Title: Microsystem Technologies
Year Published: 2018

Link to full text (if available)


Share on Social Media:                               Sign Up to like & get
recommendations!

Related content

More Information              News              Social Media              Video              Recommended



                Click one of the above tabs to view related content.