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Multilayer film of zinc oxide (ZnO)/molybdenum (Mo)/ZnO was prepared by radio-frequency magnetron sputtering. We studied the optical, electrical, structural, nanomechanical properties, and sensing characteristics of ZnO/Mo/ZnO multilayer films. ZnO/Mo/ZnO films… Click to show full abstract
Multilayer film of zinc oxide (ZnO)/molybdenum (Mo)/ZnO was prepared by radio-frequency magnetron sputtering. We studied the optical, electrical, structural, nanomechanical properties, and sensing characteristics of ZnO/Mo/ZnO multilayer films. ZnO/Mo/ZnO films annealed temperatures about 500 °C had a sheet resistance of 1.63 × 102 Ω/□ with a transmittance of 89.3% at 395 nm, and a hardness of 6.14 GPa. In addition, the gas response of the multilayer films reached 57.2%, obtained at 60 ppm for alcohol.
Journal Title: Microsystem Technologies
Year Published: 2018
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