LAUSR

The characteristic of the microelectromechanical systems (MEMS) structures can be determined by using static, modal and harmonic analyses implemented with finite element method (FEM) software packages. In the current study, two different algorithms for the open-source Elmer FEM are developed to analyze not only the biased modal analysis but also harmonic response. The proposed algorithms are implemented in Elmer FEM by using the design parameters of a MEMS structure already presented in the literature. Furthermore, as the same MEMS structure was also analyzed by using a commercial software, the simulation results of Elmer FEM are also checked with those of the commercial software. The result of Elmer FEM is almost consistent with the experimental value of the reported structure for the center frequency. Furthermore, the difference between the simulation results of Elmer FEM and those of commercial software for the same simulation conditions is almost in the range of 7% and 2.4% for the displacement and the resonance frequency, respectively. It is thought that the proposed algorithms can also be used to analyze more complex MEMS structures such as resonator and accelerometer for determining characteristic features.