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Multifunctional Si–LiNbO3 heterostructures were synthesized by the radio-frequency magnetron sputtering (RFMS) method. The structural and electrical properties of fabricated heterostructures were investigated. The optimal RFMS regimes ensuring the formation of… Click to show full abstract
Multifunctional Si–LiNbO3 heterostructures were synthesized by the radio-frequency magnetron sputtering (RFMS) method. The structural and electrical properties of fabricated heterostructures were investigated. The optimal RFMS regimes ensuring the formation of highly oriented 〈0001〉-LiNbO3 films are proposed. The synthesized heterostructures manifest all required parameters for their successful practical application for non-volatile memory units and optoelectronics.
Journal Title: Journal of Materials Science: Materials in Electronics
Year Published: 2019
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