LAUSR

Soft magnetic Co40Fe40B20 films with different tilt angle were successfully deposited on silicon substrates by using oblique sputtering technique. Different oblique angles are achieved by controlling the position of samples. The corresponding static magnetic properties of these samples were then systematically investigated. Interestingly, with the oblique angle increasing from 38° to 55°, the MOKE hysteresis loop of the thin films displays a unique and special performance with double hard axes. Meanwhile, despite of the measurement magnetic field along PR or AR direction, both of the hysteresis loops have two-stage magnetization reversal that means there are two comparably strong anisotropies in the CoFeB films. Moreover, rotating samples from in-plane to out-of-plane, the hysteresis loops demonstrate the perpendicular anisotropy exist in CoFeB films. The cross-section SEM characterizations further verify that the residual field from the magnetic cylinder will strongly impact the microstructures of thin film.