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We present the results of creating a cooled microbolometer based on the cermet films of the silicon and chromium mixture. This material is used for manufacturing the freely hanging high-resistive… Click to show full abstract
We present the results of creating a cooled microbolometer based on the cermet films of the silicon and chromium mixture. This material is used for manufacturing the freely hanging high-resistive microbolometers for the first time. The details of fabricating such microbolometers and the prospects for using cermet films to construct microbolometers are discussed. The first estimates of sensitivity of the fabricated microbolometers are given.
Keywords:
microbolometers based;
cooled microbolometers;
cermet films;
microwave cooled;
based cermet
Journal Title: Radiophysics and Quantum Electronics
Year Published: 2017
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Journal Title: Radiophysics and Quantum Electronics
Year Published: 2017
Link to full text (if available)
Share on Social Media: Sign Up to like & get
recommendations!