LAUSR

In this work, the effects of incorporating bare macroporous silicon (macro-Psi) layer with bimetallic nanoparticles Au-Ag on the performance Psi CO2 gas sensor synthesized by a laser-assisted etching (LAE) process were investigated. Well-controlled and simple immersion process of bare macro-Psi layer in the 10−3 M of silver nitrate (AgNO3) and chloroauric acid (HAuCl4) individually and in the mixing solution with ratio 1:1 was employed to synthesize monometallic AuNPs/macro-Psi, AgNPs/macro-Psi, and bimetallic Au-AgNPs/macro-Psi hybrid structures of CO2 gas sensors. Morphological properties of bare macro-Psi layer, monometallic, and bimetallic hybrid structures were investigated using X-ray diffraction (XRD), field emission scanning electron microscope (FE-SEM), and energy-dispersive X-ray analysis (EDS). Electrical characteristics (I–V)of the sensor were measured primary in a vacuum case and with CO2 at 0.2, 0.5, 1, and 1.5 mbar gas pressures. The result showed a significant enhancement in sensitivity and temporal response of the bimetallic hybrid structures compared with that of monometallic and bare macro-Psi layer and an enhanced performance of the sensors due to the high value of integrated specific surface area of the bimetallic nanoparticles and the resulting Schottky barrier height.