LAUSR

Thermoelastic damping (TED) is considered to be the main internal energy dissipation mechanism in microresonators, the study of which has become increasingly significant in the design of microresonators with high quality factor. In this paper, the bilayered cantilever, fixed-fixed and fully clamped rectangular microplate resonators are taken as the research object, and then three theoretical models of thermoelastic damping with three-dimensional heat conduction are built. The analysis on convergence items of the present three-dimensional models with different combinations of materials are carried out, and the influence of material plating on TED in Si microplate resonators is also analyzed. The analysis on the effects of the geometry size and boundary conditions on thermoelastic damping of microresonators at the first-order natural frequency are both carried out. Moreover, in order to verify the validation and accuracy of the present three-dimensional (3-D) models, the previous one-dimensional (1-D) models and the FEM models built in this paper are used to compare with the present models. Finally, the validation and accuracy of the present three-dimensional models are confirmed.