LAUSR

Abstract A multi-field coupled dynamic model for a micro resonant pressure sensor is proposed in this paper which considers molecular force, electric field force, elastic force, and air damping force. Using these equations, the nonlinear dynamical performance of the sensor is investigated. The results show that the initial clearance between the resonator and baseplate has an important effect on the vibration states of the sensor for a given voltage. For small clearance sensors, the amplitude and range of displacement oscillating becomes large when molecular force is considered. The operating pressure can influence the vibration states of the sensor, and small dynamic viscosity easily induces chaotic vibrations. Thus, the related multi-field parameters must be selected carefully to avoid harmful vibration states of the sensor.