LAUSR

Abstract This paper presents the preparation of nanostructured platinum (Pt) loaded tungsten oxide (WO3) thin films by radio frequency (RF) magnetron sputtering technique. Even though, Pt loading does not produce any phase change in WO3 lattice, it deteriorates the crystalline quality and induces defects on WO3 films. The Pt loading in WO3 has profound impact on structural and optical properties of the films by which the particle size, lattice strain and optical band gap energy are reduced. Nanoporous film with reduced particle size is obtained for 5 wt% Pt loaded WO3 sample which is crucial for gas sensors. Hence the sensing response of 5 wt% Pt loaded sample is tested towards carbon monoxide (CO) gas along with pure WO3 sample. The sensing response of Pt loaded sample is nearly 15 times higher than pure WO3 sample in non-humid ambience at an operating temperature 200 °C. This indicates the suitability of the prepared films for gas sensors. The sensing response of pure WO3 film depends on the humidity while the Pt loaded WO3 film shows stable response in both humid and non-humid ambiences.