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Abstract Direct Laser Interference Lithography (DLIL) has shown to be a promising technique to chemically and physically alter the surface of titanium. In this work, atom probe tomography analysis was… Click to show full abstract
Abstract Direct Laser Interference Lithography (DLIL) has shown to be a promising technique to chemically and physically alter the surface of titanium. In this work, atom probe tomography analysis was performed on DLIL-treated titanium to obtain the chemical composition of the surface in maxima and minima interference positions. The analysis revealed that a multilayer structure consisting of oxide/oxynitride is formed at both positions; however, the chemical composition is altered differently between the two. The observed difference is believed to be due to an uneven heating and temperature distribution, which is demonstrated by thermal simulations.
Journal Title: Applied Surface Science
Year Published: 2021
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