LAUSR

Abstract It is important for electro-optical applications of nanocrystalline diamond (NCD) films to achieve high optical transparency with low electrical resistivity. However, currently fabrication of highly transparent NCD films with reasonable electrical conductivity remains a challenge – any increase in conductivity simultaneously reduces transparency. Here, we report on fabrication of highly conductive and yet highly transparent electrodes based on boron-doped nanocrystalline diamond (B-NCD) films and Ti grids. We studied B-NCD films with variable boron content and thickness to determine preferable electrical and optical characteristics. Composite electrodes with a sheet resistance of 200 Ω/sq and optical transparency of 80% have been obtained by the integration of a thin nanostructured Ti-grid, sandwiched between the glass substrate and B-NCD layer.