LAUSR

Abstract In this paper, the effects of hydrogen (H 2 ) plasma treatment on the molybdenum (Mo)-doped indium oxide (InO) thin film that was formed on glass using the polymer-assisted deposition (PAD) process were investigated. The sheet resistance for the sample treated at the ICP power of 15 W was quenched to 167 Ω/sq. from the 680 Ω/sq. for the as-deposited sample. Compared with the as-deposited sample, both the mobility and the concentration of the sample treated at the 15 W ICP power were also increased simultaneously, resulting in an increased conductivity. From these results, it was concluded that the H 2 plasma treatment is an efficient method for the enhancement of the electrical property, as well as to remove nano-sized cracks on the surface of the PAD-Mo-doped InO without a deterioration the optical transmittance.