LAUSR

Abstract The dielectric behavior of polymer-derived amorphous silicon carbonitride was investigated. The material exhibited an interfacial polarization. Although such a polarization exhibited a sharp decrease in the dielectric constant with frequency, the loss peak from this mechanism was not clearly observed because DC conduction dominated the dielectric loss. On the other hand, a sharp increase in the dielectric constant and loss peak were observed at 350 °C at 1 kHz, indicating that the interfacial polarization enhanced at elevated temperatures. This interfacial polarization can be attributed to the migration and accumulation of charge carriers at the interface of matrix and free-carbon phases.