LAUSR

Abstract The work reports synthesis, structure and properties of doubly doped titanium dioxide coatings activated by ultraviolet and visible light. Copper within a concentration range of 0.4–3.4 at% and fluorine within a concentration range of 1.7–9.4 at% were introduced as dopants. The coatings were prepared with the help of radiofrequency plasma enhanced chemical vapor deposition technique with a single precursor compound providing both dopants and titanium (IV) chloride being a source of titanium. Elemental composition and chemical bonding analyses of the coatings were carried out with the help of X-ray photoelectron spectroscopy. The results indicate that both admixtures are chemically bound to the TiO2 matrix – a notion confirmed by Fourier transform infrared spectroscopy. Phase composition studies, performed with a low angle X-ray diffraction method, revealed a presence of a threshold concentration of the dopants affecting the coatings crystallinity. Surface morphology and its topography were studied with the help of scanning electron microscopy and atomic force microscopy. Several coatings exhibited a superhydrophilic effect upon relatively short time of illumination.