LAUSR

Abstract The recent advancement of semiconductor devices to the near-atomic scale necessitated the development of atomic layer processing methods, including molecular layer deposition (MLD). This gas-phase deposition technique creates semipermeable polymer films with precise control of composition and thickness. Herein, MLD was used to produce thin-film composite reverse osmosis membranes. Aromatic polyamide films as thin as 0.5 nm were applied to NF270 nanofiltration membranes using m-phenylenediamine and trimesoyl chloride. Within two molecular layers, desalination performance was affected. As film thickness increased to 15 nm (48 MLD cycles), performance progressed from nanofiltration to reverse osmosis metrics in terms of salt rejection and water permeance. With film thickness > 5 nm, rejection values exceeded a small sampling of commercial membranes. In all cases, a tradeoff between rejection and permeance was observed. Atomic force microscopy measurements indicate that MLD enhancement led to removal of small-scale roughness features and resulted in a root mean square roughness difference of