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Hydrogen-modulated Ar/CH4 HWP-CVD for fast preparation of multi-wall carbon nanotube arrays with high specific capacitance

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Abstract Two-dimensional Multiwalled Carbon Nanotube arrays (MWCNTs) were prepared by a novel high-density helicon wave plasma chemical vapor deposition (HWP-CVD) at room temperature. Preliminary studies show that the MWCNTs prepared… Click to show full abstract

Abstract Two-dimensional Multiwalled Carbon Nanotube arrays (MWCNTs) were prepared by a novel high-density helicon wave plasma chemical vapor deposition (HWP-CVD) at room temperature. Preliminary studies show that the MWCNTs prepared by this method has strong orientation and is perpendicular to the substrate surface, and exhibit a highly ordered array distribution. The addition of hydrogen can effectively improve the growth rate of MWCNTs and increase the aspect ratio. The height and aspect ratio of MWCNTs can be effectively increased with the increase of growth time. Electrochemical investigation indicated that MWCNTs have high specific capacitance (1.96 mF/cm−2) and excellent rate capability (81.6%).

Keywords: carbon nanotube; specific capacitance; nanotube arrays; hwp cvd; high specific

Journal Title: Diamond and Related Materials
Year Published: 2020

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