LAUSR

Abstract The Monte-Carlo rough surface code SURO is applied for the simulation of the carbon deposition and substrate erosion on rough surfaces. The energy, flux and angle of impinging particles calculated by the SDPIC code are employed as the input for the SURO simulations. The study of the carbon deposition and substrate erosion on different surface structures has been carried out with different plasma temperatures. The temporal evolution of the eroded substrate areal density on tungsten and carbon substrates has been studied under different plasma temperatures, which reveals that the material mixing process has an impact on the erosion of substrate material. For the plasma temperature of 10 eV, the eroded areal density for the tungsten substrate is about 10 19  m −2 , which is two orders of magnitude lower than that for the carbon substrate. As the plasma temperature increases to 20 eV, the discrepancy in the eroded substrate areal density between the tungsten and carbon substrates is reduced, i.e., one order of magnitude lower for the tungsten substrate.