Abstract Networked semi-occlusive microfluidic was demonstrated via fabricating channel on the surface of the silica substrate using femtosecond laser direct writing (FLDW) followed by chemical etching and covering a thin… Click to show full abstract
Abstract Networked semi-occlusive microfluidic was demonstrated via fabricating channel on the surface of the silica substrate using femtosecond laser direct writing (FLDW) followed by chemical etching and covering a thin layer of polydimethylsiloxane (PDMS) film on substrate. The microfluidic channel formation mechanism is identified as femtosecond laser irradiation leading to substrate material modification, and modified areas acquiring an increased solubility to hydrofluoric (HF) acid solution. The morphologies of networked microfluidic were characterized by using optical microscopy and scanning electronic microscopy. Furthermore, in order to test flowing characteristics of the microfluidic, we conducted the experiment of liquid injection.
               
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