LAUSR

Abstract A novel method for reverse design of the rectangular-groove dielectric surface-relief grating by modal method is presented. The principle of the reverse design method is the excitation and coupling between the propagating modes in grating. When the modes 0 and 1 are transmission through the grating, the phase difference is accumulated. By adjusting the cumulative phase difference between the modes 0 and 1, the energy can be reallocated between the − 1st and 0th order diffraction light. Thereby the diffraction efficiency of the grating − 1st and 0th order are adjusted. By using these reverse design method, we analyze the design of the beam splitter and blazed grating. As an example, a − 1st transmitted order blazed grating has been designed by reverse design method. The comparative results have shown that the geometrical parameters of the grating calculated by modal method agree well with the results simulated by the rigorous couple-wave analysis (RCWA).