LAUSR

This paper develops a millimeter scale fully packaged device in which a vortex flow of high velocity is generated inside a chamber. Under the actuation by a lead zirconate titanate (PZT) diaphragm, a flow circulates with increasing velocity after each actuating circle to form a vortex in a cavity named as the vortex chamber. At each cycle, the vibration of the PZT diaphragm creates a small net air flow through a rectifying nozzle, generates a synthetic jet which propagates by a gradual circulation toward the vortex chamber and then backward the feedback chamber. The design of such device is firstly conducted by a numerical analysis whose results are considered as the base of our experimental set-up. A vortex flow generated in the votex chamber was observed by a high-speed camera. The present approach which was illustrated by both the simulation and experiment is potential in various applications related to the inertial sensing, fluidic amplifier and micro/nano particle trapping and mixing.