LAUSR

Abstract Folded cantilevers have been utilized in MEMS devices, particularly for suspension. The structures consist of a horizontal beam segment fixed at its left end, a short downward connector (joint) at the right end, and a lower horizontal segment under the upper one. Here, the left end of the lower segment is free and a downward concentrated load is applied there. Experiments are conducted on five folded cantilevers with different lengths of the lower segment. An elastica analysis is performed, allowing for large deflections and rotations. The self-weight of the segments is included in the analysis. The effects of the end load and the relative lengths of the segments are investigated. The experimental results compare well to those from the theory.