LAUSR

Abstract Co 2 MnSi (CMS) thin films with different thickness were deposited on Si substrate and annealed at different temperatures to investigate the evolution of microstructure and magnetic properties. When T a was fixed at 500 °C, due to the enhancement of B 2-ordering, the increasing of CMS thickness to 100 nm will induce the increasing of M s to 862 emu/cc. When CMS film thickness was fixed at 75 nm, the abnormal decrease of the M s value from 782 emu/cc to 614 emu/cc were observed with increasing T a to 700 °C which may be attributed to the intermixing between CMS layer and Ta layer.