LAUSR

Abstract We have systematically investigated the effects of four critical sputtering parameters, power, pressure, temperature, and time, on the sheet resistance and optical transmittance of aluminum doped zinc oxide (AZO) grown by RF magnetron sputtering. Two distinct features that sheet resistance is extreme sensitive to aforesaid deposition parameters, while optical transmittance keep almost unchanged, have been disclosed. Based on these properties, high-grade AZO thin films (sheet resistance of 4.54Ω/sq, transmittance more than 84%, 1500 nm thickness) and a CZTS thin films solar cell with conversion efficiency of 5.1% on soda-lime glass were grown by optimizing deposition parameters to 0.3Pa, 200 °C, 120 min, and 180 W, using AZO ceramic target (2 wt% Al2O3). We also firstly modifying the traditional only solutions cleaning (OSC) method to burning treatment method (BTM), which is not only time-saving, but also avoiding the stripping of Mo layer and the usage of toxic and organic reagent of acetone.