LAUSR

Abstract In contrast to Indium droplets the usage of Ga or Al droplets for the local droplet etching (LDE) technique is well established. It has been shown previously that In-droplets or In-alloys can be used for LDE with focus on small hole-depths at low etching temperatures. With our recent experiments we reveal that In-LDE is also well suited for the creation of very deep nanoholes (exceeding 100 nm) and very low densities in the range of 106 cm−2 for large average distances of several micrometers. The unexpected high thermal stability of the etching process itself as well as the formed wall-like structures clearly points to an intermixing between etching and substrate material during the LDE-process. This can be related to the lack of As during LDE. Additional experiments with capping layers also reveal high surface-roughness probably caused by a lattice mismatch, which can be also explained by intermixing. A second LDE step with Al can be applied to avoid roughening effects.