LAUSR

Abstract Face-to-face annealed metalorganic vapor phase epitaxy (MOVPE)- grown AlN templates with sputtered AlN nucleation layers (FFA MOSp-AlN templates) were fabricated on vicinal sapphire substrates. The sputtered thin AlN layer supplies AlN seeds that are well aligned to the c-axis. The MOVPE growth with a relatively thick AlN enlarges crystal grains with a low concentration of impurities. Face-to-face annealing at high temperatures reduces the twist component of AlN films due to recrystallization, and AlN films with low threading dislocation densities are formed. The full width at half maximum (FWHM) of the (10-12) X-ray rocking curves (XRCs) of AlN templates decreased as the thickness of the MOVPE-grown AlN layer increased. The FWHMs for the (0002) and (10-12) XRCs of the 300-nm-thick AlN templates with an off-cut angle of 0.6° were 10 and 337 arcsec, respectively. The concentrations of O, Si, and C impurities in the FFA MOSp-AlN templates were lower than those in the face-to-face annealed sputtered AlN templates. Si doped Al0.7Ga0.3N films, which are typically used as n-type AlGaN layers for UVC LEDs, were grown on the FFA MOSp-AlN templates with various off-cut angles. The AlGaN films with smooth flat surfaces were obtained using the FFA MOSp-AlN template with larger off-cut angles due to the suppression of the large hillock formation