LAUSR

Abstract Visible light active fluorine modified TiO2 thin films were deposited through simple and low-cost nebulizer spray technique. The structural and morphological studies of the prepared films were investigated by X-ray diffraction and scanning electron microscopy. The chemical state of the elements over the film surface was analyzed by X- ray photoelectron spectroscopy. The optical absorption studies revealed a noticeable reduction in the band gap due to the inclusion of F atom into TiO2 lattice. Photoluminescence spectra exhibited the enhancement of fluorine-induced oxygen vacancies and effective charge separation due to the formation of Ti3+ ions in F-TiO2 thin films. Doping of fluorine on TiO2 lattice showed an effective increase in photocatalytic degradation performance with good stability and repeatability under visible light.