Abstract In this study, we systematically investigate the dynamic magnetic properties of FeSiAl-Al 2 O 3 thin films fabricated by hybrid oblique gradient-composition sputtering technique with respect to temperature ranging… Click to show full abstract
Abstract In this study, we systematically investigate the dynamic magnetic properties of FeSiAl-Al 2 O 3 thin films fabricated by hybrid oblique gradient-composition sputtering technique with respect to temperature ranging from 300 K to 420 K. The magnetic anisotropy field H K and ferromagnetic resonance frequency f FMR can be tuned from 14.06 to 110.18 Oe and 1.05–3.05 GHz respectively, by changing the oblique angle, which can be interpreted in terms of the contribution of stress-induced anisotropy and shape anisotropy. In addition, the thermal stability of FeSiAl-Al 2 O 3 films in terms of magnetic anisotropy H K and ferromagnetic resonance frequency f FMR are enhanced with the increase of oblique angle up to 35° while the thermal stability of effective Gilbert damping factor α eff and the maximum imaginary permeability μ’’ max are improved with the increase of oblique angle up to 45°.
               
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