LAUSR

Abstract Micro-mechanical property anisotropy of Au micro-pillars composed of nano-columnar grains embedded in micro-columnar textures was evaluated by micro-compression tests. The micro-pillars having dimensions of 10 × 10 × 20 μm3 were fabricated from constant-current electroplated Au film by focus ion beam milling. The long-axis of the nano-columnar grains was parallel to the long-axis of the micro-columnar textures, and the long-axes were parallel to growth direction of the electroplated Au film. The deformation behavior changed from brittle fracture to multiple slip deformation and the yield stress varied from 650 to 300 MPa when the compression direction changed from perpendicular to parallel to the long-axis of the micro-columnar textures.