LAUSR

Abstract Atomic shadowing during kinetically limited physical vapor deposition usually causes the formation of one-dimensional nanostructures with novel shapes. In this letter, we report the variety of surface topography and shapes of columns of CeO2 films deposited at different temperatures using glancing angle deposition (GLAD) technique. The wettability of the films was also investigated. Rough and triangular pyramid surface and regular nanorods were successfully obtained at a deposition temperature of 400 °C. Water contact angle (WCA) tests show that the rougher and regular the surface is, the higher WCA we get, and a maximum WCA of 143.2° was obtained at the temperature of 400 °C.