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Noise analysis and improvement of a micro-electro-mechanical-systems fluxgate sensor

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Abstract An integrated micro solenoid fluxgate sensor with a Co-based amorphous core is presented in this work based on the Micro-Electro-Mechanical System (MEMS) technologies. As the advantage of miniaturization, the… Click to show full abstract

Abstract An integrated micro solenoid fluxgate sensor with a Co-based amorphous core is presented in this work based on the Micro-Electro-Mechanical System (MEMS) technologies. As the advantage of miniaturization, the micro fluxgate sensor is found to be operated under wide excitation frequency range of 100 kHz–1 MHz. Ultra-low frequency noise (

Keywords: noise analysis; micro electro; electro mechanical; fluxgate sensor

Journal Title: Measurement
Year Published: 2018

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