Abstract An integrated micro solenoid fluxgate sensor with a Co-based amorphous core is presented in this work based on the Micro-Electro-Mechanical System (MEMS) technologies. As the advantage of miniaturization, the… Click to show full abstract
Abstract An integrated micro solenoid fluxgate sensor with a Co-based amorphous core is presented in this work based on the Micro-Electro-Mechanical System (MEMS) technologies. As the advantage of miniaturization, the micro fluxgate sensor is found to be operated under wide excitation frequency range of 100 kHz–1 MHz. Ultra-low frequency noise (
               
Click one of the above tabs to view related content.