LAUSR

Abstract This study reports the quantitative, precise and accurate results of nanoscale friction measurements with the use of an Atomic Force Microscope calibrated with a precise nanoforce sensor. For this purpose, three samples of spin-coated thin Polymethylmethacrylate (PMMA) films were prepared with the following thicknesses: 235, 343, and 513 nm. Three different AFM probes were used for the friction measurements: with diamond-like carbon (DLC) tip with a small (15 nm) or big (2 µm) tip radius, and a reference silicon tip with a small (8 nm) radius. The results show that in all of the studied cases, the coefficient of friction strongly depends on the applied load, being much higher for a lower load. Furthermore, a strong relation of the friction force on the cantilever’s geometry, the scanning velocity, and the film thickness was observed.