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Au nanostructures of different types are widely employed as substrates for surface-enhanced Raman spectroscopy (SERS) due to their strong plasmon-related near-field enhancement in the visible and NIR frequency range as… Click to show full abstract
Au nanostructures of different types are widely employed as substrates for surface-enhanced Raman spectroscopy (SERS) due to their strong plasmon-related near-field enhancement in the visible and NIR frequency range as well as their potential for biologically active interfaces. We report on a fabrication route for highly periodic Au nano-discs by combination of laser interference lithography (LIL) with nanoimprint lithography (NIL) using a double-layer lift-off process to produce extremely homogenous periodic arrays over areas of 6 wafer scale with sufficiently sharp plasmonic resonance. FDTD simulations were done to yield specifically designed plasmonic activity at a wavelength of 785nm commonly used in Raman spectrometers. Optical characterisation of the resulting samples was compared to simulation predictions and linked to SERS signal intensity and reproducibility. Display Omitted
Journal Title: Microelectronic Engineering
Year Published: 2017
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