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Fabrication of mechanically stable AAO membrane with improved fluid permeation properties

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Abstract This research exhibits the development of a thinner and mechanically stable anodic aluminum oxide (AAO) membrane system by providing Al supporting mesh known as Al textured AAO (AT-AAO) membrane.… Click to show full abstract

Abstract This research exhibits the development of a thinner and mechanically stable anodic aluminum oxide (AAO) membrane system by providing Al supporting mesh known as Al textured AAO (AT-AAO) membrane. Accordingly AAO was fabricated on both sides of Al substrate which was followed by subsequent etching of AAO, and Al from one side to form supporting mesh pattern. The AT-AAO accentuated almost 3 times greater mechanical stability than free standing AAO (FS-AAO) membrane. Both of the membrane systems were compared for fluid flow and permeability of acetone, methanol, dimethylformamide, water, cyclohexane, ethanol, isopropyl alcohol, and n-butanol. At maximum tolerable pressure, the AT-AAO membrane gave 4 times higher flow rate and 3.65 times higher permeation than FS-AAO membrane in acetone. The AT-AAO membrane of thickness 5.4 μm shows 3 times higher permeability as compared to theoretical calculations. This much enhancement factor in fluid permeation has never been reported before in AAO membrane systems.

Keywords: fluid permeation; mechanically stable; membrane; aao membrane

Journal Title: Microelectronic Engineering
Year Published: 2018

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